Abstract:The radar signal propagation delay caused by the spatiotamporal change of atmospheric water vapor contents changing is one of the major error sources for interferometry SAR (InSAR). By using GPS observation data of seven terms from July 2006 to July 2009, and the corresponding MODIS data in Xi’an,the MODIS water vapor correction model is studied, and an experiment of DInSAR atmospheric delay correction in Xi’an area is carried out. Compared with GPS observations, the results show that MODIS data can be used to correct atmospheric delay in DInSAR results when the atmosphere state change slowly, though the accuracy improvement is not very obvious.