Abstract：Aiming at the problem that the traditional synthetic aperture radar interferometry technology is greatly affected by tropospheric delay when monitoring surface deformation, we use the measured meteorological parameters and NCEP meteorological reanalysis data to establish atmospheric correction models respectively. The tropospheric delay correction is performed on the interferogram generated in Yinzhou District to obtain high-precision surface deformation in Yinzhou District from 2018 to 2020. To analyze the effect of different atmospheric correction models on weakening the tropospheric delay effect, we compare the monitoring results with the measured level data in the same period. The results show that the RMSE of the ground meteorological information model, the NCEP meteorological reanalysis data model, and the InSAR monitoring results without atmospheric correction are 2.78 mm, 3.86 mm, and 5.62 mm, respectively. The results further show that the use of the ground meteorological information model to correct the atmospheric phase error has higher monitoring accuracy and can effectively weaken the influence of tropospheric delay on interferometry results.