基于八对差分电容极板的静电悬浮加速度计的设计
胡明;白彦峥;祝竺;吴书朝;周泽兵;
DESIGN OF ELECTROSTATIC SUSPENSION ACCELEROMETER BASED ON EIGHT PAIRS OF DIFFERENTIAL CAPACITANCE ELECTRODES
Hu Ming;Bai Yanzheng ;Zhu Zhu ;Wu Shuchao ;and Zhou Zebing;
. 2012, (5): 154 -159 .